A Fuzzy-neural Approach Incorporating Exponentially Discounted Future Workload for Predicting Wafer Lot Output Time
نویسندگان
چکیده
Lot output time prediction is a critical task to a wafer fabrication plant (wafer fab). To enhance the effectiveness, a look-ahead FBPN incorporating the future release plan is constructed in this study. Three nearest exponentially discounted future workloads, modified from Chen’s nearest future discounted workloads, are proposed for the look-ahead function. According to experimental results, the prediction accuracy of the look-ahead FBPN was significantly better than those of some existing approaches. Besides, the proposed nearest exponentially discounted future workload functions are shown to be more effective than Chen’s nearest future discounted workload functions in incorporating the fab’s future release plan.
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